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940715s1994 b 000 0 eng d |
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|aTK7867|bC46 1994
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|aKodasToivo
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245 |
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|aThe chemistry of Metal CVD / |cedited by Toivo Kodas and Mark Hampden-Smith
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260 |
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|aWeinheim ; |aNew York : |bVCH, |c1994
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300 |
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|axxiv, 530 p : |bill ; |c25 cm
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504 |
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|aIncludes bibliographical references (p. 490-498)
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650 |
0
|
|aElectronic circuit design
|
650 |
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|
|aChemical vapor deposition
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650 |
0
|
|aMetallic films
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700 |
1
|
|aHampden-Smith Mark J
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